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The CLS-700 T is a compression sampler combined with a LiQuilaz® particle counter for effectively measuring particle in effervescent chemicals. The system eliminates bubbles by pressurizing the sample and forcing bubbles into solution. This sampling system can be started or stopped by a process tool, including automatic shut off during a bath change, preventing the injection of chemical foam or air into the particle counter. |
The CLS-700 T can be integrated into a wet bench for continuous particle monitoring or located on a cart for increased mobility. It is fully compliant with the new SEMI C1 standard for particle measurement of process chemicals.
Features
• Sampling of hot, corrosive chemicals up to 150°C
• Sizing sensitivities start at 0.2 μm with integrated LiQuilaz sensor
• 15 user-adjustable sizing channels
• Compatibility with effervescent chemicals
• Front panel status, function, pressure, and flow rate indicators
• Internal leak detection and containment
• Bubble suppression to 60 psi
• Triggering, providing automatic start or stop based on input
from a process tool
• Polypropylene housing meets the FM4910 flame retardant standard
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